JPH0724187Y2 - チャック - Google Patents

チャック

Info

Publication number
JPH0724187Y2
JPH0724187Y2 JP1990005324U JP532490U JPH0724187Y2 JP H0724187 Y2 JPH0724187 Y2 JP H0724187Y2 JP 1990005324 U JP1990005324 U JP 1990005324U JP 532490 U JP532490 U JP 532490U JP H0724187 Y2 JPH0724187 Y2 JP H0724187Y2
Authority
JP
Japan
Prior art keywords
wafer
chuck
rotation axis
radius
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990005324U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0396145U (en]
Inventor
直昭 村里
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP1990005324U priority Critical patent/JPH0724187Y2/ja
Publication of JPH0396145U publication Critical patent/JPH0396145U/ja
Application granted granted Critical
Publication of JPH0724187Y2 publication Critical patent/JPH0724187Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1990005324U 1990-01-23 1990-01-23 チャック Expired - Fee Related JPH0724187Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990005324U JPH0724187Y2 (ja) 1990-01-23 1990-01-23 チャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990005324U JPH0724187Y2 (ja) 1990-01-23 1990-01-23 チャック

Publications (2)

Publication Number Publication Date
JPH0396145U JPH0396145U (en]) 1991-10-01
JPH0724187Y2 true JPH0724187Y2 (ja) 1995-06-05

Family

ID=31509039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990005324U Expired - Fee Related JPH0724187Y2 (ja) 1990-01-23 1990-01-23 チャック

Country Status (1)

Country Link
JP (1) JPH0724187Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101375144B1 (ko) * 2013-02-22 2014-03-17 호서대학교 산학협력단 스핀코터용 기판 홀더 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0235636U (en]) * 1988-08-31 1990-03-07

Also Published As

Publication number Publication date
JPH0396145U (en]) 1991-10-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees